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Mobility analysis of surface roughness scattering in FinFET devices
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Authors
Lee, Jae Woo
;
Jang, Doyoung
;
Mouis, Mireille
;
Kim, Gyu Tae
;
Chiarella, Thomas
;
Hoffmann, Thomas Y.
;
Ghibaudo, Gérard
ISSN
0038-1101
Issue
1
Journal
Solid-State Electronics
Volume
62
Title
Mobility analysis of surface roughness scattering in FinFET devices
Publication type
Journal article
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