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CMP of novel materials for frontend-of-line and backend-of-line applications

dc.contributor.authorLeunissen, Peter
dc.contributor.authorOng, Patrick
dc.contributor.authorTeugels, Lieve
dc.date.accessioned2021-10-19T15:27:44Z
dc.date.available2021-10-19T15:27:44Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19289
dc.sourceIIOimport
dc.titleCMP of novel materials for frontend-of-line and backend-of-line applications
dc.typeOral presentation
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.source.peerreviewno
dc.source.conference27th CMP Users Meeting
dc.source.conferencedate14/10/2011
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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