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Miniaturized laser doppler vibrometers on SOI

dc.contributor.authorLi, YanLu
dc.date.accessioned2021-10-19T15:28:48Z
dc.date.available2021-10-19T15:28:48Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19292
dc.sourceIIOimport
dc.titleMiniaturized laser doppler vibrometers on SOI
dc.typeProceedings paper
dc.contributor.imecauthorLi, YanLu
dc.contributor.orcidimecLi, YanLu::0000-0003-3440-1972
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage95
dc.source.conference12th FEA PhD Symposium
dc.source.conferencedate7/12/2011
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - open access


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