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Solid phase epitaxy of Germanium on Silicon substrates

dc.contributor.authorLieten, Ruben
dc.contributor.authorMa, Quanbao
dc.contributor.authorGuzman, Julian
dc.contributor.authorAger, J.W.
dc.contributor.authorHaller, E.E.
dc.contributor.authorLocquet, Jean-Pierre
dc.date.accessioned2021-10-19T15:30:56Z
dc.date.available2021-10-19T15:30:56Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19298
dc.sourceIIOimport
dc.titleSolid phase epitaxy of Germanium on Silicon substrates
dc.typeProceedings paper
dc.contributor.imecauthorLieten, Ruben
dc.source.peerreviewyes
dc.source.beginpage1339-s03-02
dc.source.conferencePlasma-Assisted Materials Processing and Synthesis
dc.source.conferencedate24/04/2011
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://dx.doi.org/10.1557/opl.2011.862
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1339


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