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An investigation of stiction in Poly-SiGe micromirror

dc.contributor.authorLing, Fangzhou
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorBeernaert, Roel
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-19T15:33:54Z
dc.date.available2021-10-19T15:33:54Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19306
dc.sourceIIOimport
dc.titleAn investigation of stiction in Poly-SiGe micromirror
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage157
dc.source.endpage162
dc.source.conferenceIEEE 61st Electronic Components and Technology Conference - ECTC
dc.source.conferencedate31/05/2011
dc.source.conferencelocationLake Buena Vista, FL USA
imec.availabilityPublished - imec


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