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Investigation of temporary stiction in poly-SiGe micromirror arrays

dc.contributor.authorLing, Fangzhou
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLin, Wan-Yu
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-19T15:34:16Z
dc.date.available2021-10-19T15:34:16Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19307
dc.sourceIIOimport
dc.titleInvestigation of temporary stiction in poly-SiGe micromirror arrays
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2378
dc.source.endpage2381
dc.source.conference16th International Conference on Solid-State Sensors, Actuators and Microsystems - Transducers
dc.source.conferencedate5/06/2011
dc.source.conferencelocationBeijing China
imec.availabilityPublished - open access


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