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Towards an all-track 300 mm process for direct self-assembly
Publication:
Towards an all-track 300 mm process for direct self-assembly
Date
2011
Journal article
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22923.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Liu, Chi-Chun
;
Thode, Christopher J.
;
Rincon Delgadillo, Paulina
;
Craig, Gordon S.W.
;
Nealy, Paul F.
;
Gronheid, Roel
Journal
Journal of Vacuum Science and Technology B
Abstract
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1899
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Citations
Metrics
Views
1899
since deposited on 2021-10-19
427
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations