Towards an all-track 300 mm process for direct self-assembly

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Authors

Liu, Chi-Chun; Thode, Christopher J.; Rincon Delgadillo, Paulina; Craig, Gordon S.W.; Nealy, Paul F.; Gronheid, Roel

ISSN

1071-1023

Issue

6

Journal

Journal of Vacuum Science and Technology B

Volume

29

Title

Towards an all-track 300 mm process for direct self-assembly

Publication type

Journal article

Embargo date

9999-12-31

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