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Towards an all-track 300 mm process for direct self-assembly

dc.contributor.authorLiu, Chi-Chun
dc.contributor.authorThode, Christopher J.
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorCraig, Gordon S.W.
dc.contributor.authorNealy, Paul F.
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-19T15:35:44Z
dc.date.available2021-10-19T15:35:44Z
dc.date.issued2011
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19311
dc.sourceIIOimport
dc.titleTowards an all-track 300 mm process for direct self-assembly
dc.typeJournal article
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage06F203
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue6
dc.source.volume29
imec.availabilityPublished - open access
imec.internalnotespaper from 55th EIPBN conference


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