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Fabrication of an electrostatically actuated impingement cooling device

dc.contributor.authorMajeed, Bivragh
dc.contributor.authorOprins, Herman
dc.contributor.authorVandevelde, Bart
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorFiorini, Paolo
dc.date.accessioned2021-10-19T15:52:33Z
dc.date.available2021-10-19T15:52:33Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19357
dc.sourceIIOimport
dc.titleFabrication of an electrostatically actuated impingement cooling device
dc.typeProceedings paper
dc.contributor.imecauthorMajeed, Bivragh
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.source.peerreviewyes
dc.source.conference44th International Microelectronics Symposium - IMAPS
dc.source.conferencedate9/10/2011
dc.source.conferencelocationLong Beach, CA USA
imec.availabilityPublished - imec


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