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Silicon microfilter device fabrication and characterization for diverse microfluidics applications

dc.contributor.authorMajeed, Bivragh
dc.contributor.authorZhang, Lei
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorSoussan, Philippe
dc.contributor.authorFiorini, Paolo
dc.date.accessioned2021-10-19T15:52:55Z
dc.date.available2021-10-19T15:52:55Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19358
dc.sourceIIOimport
dc.titleSilicon microfilter device fabrication and characterization for diverse microfluidics applications
dc.typeProceedings paper
dc.contributor.imecauthorMajeed, Bivragh
dc.contributor.imecauthorZhang, Lei
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1834
dc.source.endpage1838
dc.source.conferenceIEEE 61s Electronic Components and Technology Conference - ECTC
dc.source.conferencedate31/05/2011
dc.source.conferencelocationOrlando, FL USA
imec.availabilityPublished - open access


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