A detailed study of a novel wafer separation method for surface sensitive MEMS wafers

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Authors
Malachowski, Karl; Severi, Simone; Van Hoof, Rita; Sangameswaran, Sandeep; Witvrouw, Ann; Genda, Satoshi; Tabuchi, Tomotaka; Uchiyama, Naoki
Conference
MRS Fall Meeting Symposium TT: Microelectromechanical Systems: Materials and Devices V
Title
A detailed study of a novel wafer separation method for surface sensitive MEMS wafers
Publication type
Oral presentation
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