Publication:

A detailed study of a novel wafer separation method for surface sensitive MEMS wafers

Date

2011
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Author(s)

Malachowski, Karl
;
Severi, Simone  
;
Van Hoof, Rita  
;
Sangameswaran, Sandeep
;
Witvrouw, Ann
;
Genda, Satoshi
;
Tabuchi, Tomotaka
;
Uchiyama, Naoki

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2000 since deposited on 2021-10-19
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2000 since deposited on 2021-10-19
Acq. date: 2025-10-23

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