Backside illuminated AlGaN-on-Si UV detectors integrated by high density flip-chip bonding

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Authors

Malinowski, Pawel; Duboz, Jean-Yves; De Moor, Piet; John, Joachim; Minoglou, Kiki; Srivastava, Puneet; Abdul, Hameed; Patel, Manojkumar; Osman, Haris; Semond, Fabrice; Frayssinet, Eric; Hochedez, Jean-Francois; Giordanengo, Boris; Van Hoof, Chris; Mertens, Robert

ISSN

1610-1634

Issue

7_8

Journal

Physica Status Solidi C

Volume

8

Title

Backside illuminated AlGaN-on-Si UV detectors integrated by high density flip-chip bonding

Publication type

Journal article

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