AlGaN-on-Si-based 10-um pixel-to-pixel pitch hybrid imagers for the EUV range

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Authors

Malinowski, Pawel; Duboz, Jean-Yves; De Moor, Piet; John, Joachim; Minoglou, Kiki; Srivastava, Puneet; Semond, Fabrice; Frayssinet, Eric; Giordanengo, Boris; BenMoussa, Ali; Kroth, Udo; Gottwald, Alexander; Laubis, Christian; Mertens, Robert; Van Hoof, Chris

ISSN

0741-3106

Issue

11

Journal

IEEE Electron Device Letters

Volume

32

Title

AlGaN-on-Si-based 10-um pixel-to-pixel pitch hybrid imagers for the EUV range

Publication type

Journal article

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