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Extreme ultraviolet detection using AlGaN-on-Si inverted Schottky photodiodes

dc.contributor.authorMalinowski, Pawel
dc.contributor.authorDuboz, Jean-Yves
dc.contributor.authorDe Moor, Piet
dc.contributor.authorMinoglou, Kiki
dc.contributor.authorJohn, Joachim
dc.contributor.authorMartin Horcajo, Sara
dc.contributor.authorSemond, Fabrice
dc.contributor.authorFrayssinet, Eric
dc.contributor.authorVerhoeve, Peter
dc.contributor.authorEsposito, Marco
dc.contributor.authorGiordanengo, Boris
dc.contributor.authorBenMoussa, Ali
dc.contributor.authorMertens, Robert
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-19T15:56:04Z
dc.date.available2021-10-19T15:56:04Z
dc.date.issued2011
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19366
dc.sourceIIOimport
dc.titleExtreme ultraviolet detection using AlGaN-on-Si inverted Schottky photodiodes
dc.typeJournal article
dc.contributor.imecauthorMalinowski, Pawel
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecMalinowski, Pawel::0000-0002-2934-470X
dc.source.peerreviewyes
dc.source.beginpage141104
dc.source.journalApplied Physics Letters
dc.source.issue14
dc.source.volume98
dc.identifier.urlhttp://apl.aip.org/resource/1/applab/v98/i14/p141104_s1
imec.availabilityPublished - imec


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