Extreme ultraviolet detection using AlGaN-on-Si inverted Schottky photodiodes

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Authors

Malinowski, Pawel; Duboz, Jean-Yves; De Moor, Piet; Minoglou, Kiki; John, Joachim; Martin Horcajo, Sara; Semond, Fabrice; Frayssinet, Eric; Verhoeve, Peter; Esposito, Marco; Giordanengo, Boris; BenMoussa, Ali; Mertens, Robert; Van Hoof, Chris

ISSN

0003-6951

Issue

14

Journal

Applied Physics Letters

Volume

98

Title

Extreme ultraviolet detection using AlGaN-on-Si inverted Schottky photodiodes

Publication type

Journal article

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