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3D technology roadmap and status

dc.contributor.authorMarchal, Pol
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorEneman, Geert
dc.contributor.authorMoroz, V.
dc.contributor.authorBadaroglu, Mustafa
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorThijs, Steven
dc.contributor.authorLinten, Dimitri
dc.contributor.authorKatti, Guruprasad
dc.contributor.authorStucchi, Michele
dc.contributor.authorVandevelde, Bart
dc.contributor.authorOprins, Herman
dc.contributor.authorCherman, Vladimir
dc.contributor.authorCroes, Kris
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorLa Manna, Antonio
dc.contributor.authorTravaly, Youssef
dc.contributor.authorBeyne, Eric
dc.contributor.authorCartuyvels, Rudi
dc.date.accessioned2021-10-19T16:00:42Z
dc.date.available2021-10-19T16:00:42Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19378
dc.sourceIIOimport
dc.title3D technology roadmap and status
dc.typeProceedings paper
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorBadaroglu, Mustafa
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorLa Manna, Antonio
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorCartuyvels, Rudi
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceIEEE International Interconnect Technology Conference and Materials for Advanced Metallization - IITC/MAM
dc.source.conferencedate8/05/2011
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - open access


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