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Discovering practical use of sensor wafers in CCP reactors

dc.contributor.authorMilenin, Alexey
dc.contributor.authorDemand, Marc
dc.contributor.authorBoullart, Werner
dc.contributor.authorArleo, Paul
dc.date.accessioned2021-10-19T16:19:48Z
dc.date.available2021-10-19T16:19:48Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19427
dc.sourceIIOimport
dc.titleDiscovering practical use of sensor wafers in CCP reactors
dc.typeProceedings paper
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage409
dc.source.endpage414
dc.source.conferenceChina Semiconductor Technology International Conference - CSTIC
dc.source.conferencedate13/03/2011
dc.source.conferencelocationShanghai China
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 34, Issue 1


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