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3D-carrier profiling in FinFETs using scanning spreading resistance microscopy

dc.contributor.authorMody, Jay
dc.contributor.authorZschaetzsch, Gerd
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorEneman, Geert
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorSchulze, Andreas
dc.contributor.authorChiarella, Thomas
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorHoffmann, Thomas
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T16:27:35Z
dc.date.available2021-10-19T16:27:35Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19445
dc.sourceIIOimport
dc.title3D-carrier profiling in FinFETs using scanning spreading resistance microscopy
dc.typeProceedings paper
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewno
dc.source.beginpage119
dc.source.endpage122
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate5/12/2011
dc.source.conferencelocationWashington, DC USA
imec.availabilityPublished - imec


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