N-type and p-type ultra shallow junctions by atomic layer epitaxy and laser anneal

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Authors
Nguyen, N.D.; Souriau, Laurent; Shimizu, Y.; Jiang, Sijia; Rosseel, Erik; Everaert, Jean-Luc; Moussa, Alain; Clarysse, Trudo; Loo, Roger; Vandervorst, Wilfried; Caymax, Matty
Conference
7th International Conference on Silicium Epitaxy and Heterostructures - ICSI-7
Title
N-type and p-type ultra shallow junctions by atomic layer epitaxy and laser anneal
Publication type
Oral presentation
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