Publication:
N-type and p-type ultra shallow junctions by atomic layer epitaxy and laser anneal
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2043 since deposited on 2021-10-19
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Acq. date: 2026-02-25
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Statistics
Views
2043 since deposited on 2021-10-19
1last month
1last week
Acq. date: 2026-02-25
Citations