Show simple item record

Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy

dc.contributor.authorOhyama, Hidenori
dc.contributor.authorNaka, N.
dc.contributor.authorTakakura, K.
dc.contributor.authorTsunoda, I.
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-19T16:51:04Z
dc.date.available2021-10-19T16:51:04Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19504
dc.sourceIIOimport
dc.titleEvaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage484
dc.source.endpage487
dc.source.journalMicroelectronic Engineering
dc.source.issue4
dc.source.volume88
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
21901.pdf
Size:
382.2Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record