Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy

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Authors

Ohyama, Hidenori; Naka, N.; Takakura, K.; Tsunoda, I.; Bargallo Gonzalez, Mireia; Simoen, Eddy; Claeys, Cor

ISSN

0167-9317

Issue

4

Journal

Microelectronic Engineering

Volume

88

Title

Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy

Publication type

Journal article

Embargo date

9999-12-31

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