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Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy
Publication:
Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ohyama, Hidenori
;
Naka, N.
;
Takakura, K.
;
Tsunoda, I.
;
Bargallo Gonzalez, Mireia
;
Simoen, Eddy
;
Claeys, Cor
Journal
Microelectronic Engineering
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1920
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Acq. date: 2025-12-12
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Metrics
Views
1920
since deposited on 2021-10-19
2
last month
Acq. date: 2025-12-12
Citations