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Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy
Publication:
Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy
Date
2011
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ohyama, Hidenori
;
Naka, N.
;
Takakura, K.
;
Tsunoda, I.
;
Bargallo Gonzalez, Mireia
;
Simoen, Eddy
;
Claeys, Cor
Journal
Microelectronic Engineering
Abstract
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1915
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Acq. date: 2025-10-24
Citations
Metrics
Views
1915
since deposited on 2021-10-19
417
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations