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Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions

dc.contributor.authorOliver, M.J.
dc.contributor.authorHernando-Garcia, J.
dc.contributor.authorSanchez-Rojas, J.L.
dc.contributor.authorAbabneh, A.
dc.contributor.authorSeidel, H.
dc.contributor.authorSchmid, U.
dc.contributor.authorOlivares, J.
dc.contributor.authorIborra, E.
dc.contributor.authorPobedinskas, P.
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-19T16:53:05Z
dc.date.available2021-10-19T16:53:05Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19509
dc.sourceIIOimport
dc.titleResonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions
dc.typeProceedings paper
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.beginpage80661A
dc.source.conferenceSmart Sensors, Actuators, and MEMS V
dc.source.conferencedate18/04/2011
dc.source.conferencelocationPrague Czech Republic
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 8066


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