dc.contributor.author | Pantisano, Luigi | |
dc.contributor.author | Afanasiev, Valeri | |
dc.contributor.author | Cimino, Salvatore | |
dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Goux, Ludovic | |
dc.contributor.author | Chen, Yangyin | |
dc.contributor.author | Kittl, Jorge | |
dc.contributor.author | Wouters, Dirk | |
dc.contributor.author | Jurczak, Gosia | |
dc.date.accessioned | 2021-10-19T17:03:49Z | |
dc.date.available | 2021-10-19T17:03:49Z | |
dc.date.issued | 2011 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19535 | |
dc.source | IIOimport | |
dc.title | Towards barrier height modulation in HfO2/TiN by oxygen scavenging - Dielectric defects or metal induced gap states? | |
dc.type | Journal article | |
dc.contributor.imecauthor | Afanasiev, Valeri | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Goux, Ludovic | |
dc.contributor.imecauthor | Chen, Yangyin | |
dc.contributor.imecauthor | Jurczak, Gosia | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1251 | |
dc.source.endpage | 1254 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 7 | |
dc.source.volume | 88 | |
imec.availability | Published - open access | |
imec.internalnotes | INFOS 2011 paper | |