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Towards barrier height modulation in HfO2/TiN by oxygen scavenging - Dielectric defects or metal induced gap states?
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1 since deposited on 2021-10-19
Acq. date: 2026-02-26
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1897 since deposited on 2021-10-19
Acq. date: 2026-02-26
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Downloads
1 since deposited on 2021-10-19
Acq. date: 2026-02-26
Views
1897 since deposited on 2021-10-19
Acq. date: 2026-02-26
Citations