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Advanced organic polymers for the aggressive scaling of low-k materials

dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorHuffman, Craig
dc.contributor.authorZhao, Larry
dc.contributor.authorHeylen, Nancy
dc.contributor.authorOno, Y
dc.contributor.authorNakajima, M
dc.contributor.authorNakatani, K
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-19T17:04:16Z
dc.date.available2021-10-19T17:04:16Z
dc.date.issued2011
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19536
dc.sourceIIOimport
dc.titleAdvanced organic polymers for the aggressive scaling of low-k materials
dc.typeJournal article
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorBeyer, Gerald
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage04DB01
dc.source.journalJapanese Journal of Applied Physics
dc.source.issue4
dc.source.volume80
imec.availabilityPublished - open access


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