Advanced organic polymers for the aggressive scaling of low-k materials

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Authors

Pantouvaki, Marianna; Huffman, Craig; Zhao, Larry; Heylen, Nancy; Ono, Y; Nakajima, M; Nakatani, K; Beyer, Gerald; Baklanov, Mikhaïl

ISSN

0021-4922

Issue

4

Journal

Japanese Journal of Applied Physics

Volume

80

Title

Advanced organic polymers for the aggressive scaling of low-k materials

Publication type

Journal article

Embargo date

9999-12-31

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