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Advanced organic polymers for the aggressive scaling of low-k materials
Publication:
Advanced organic polymers for the aggressive scaling of low-k materials
Date
2011
Journal article
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22103.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pantouvaki, Marianna
;
Huffman, Craig
;
Zhao, Larry
;
Heylen, Nancy
;
Ono, Y
;
Nakajima, M
;
Nakatani, K
;
Beyer, Gerald
;
Baklanov, Mikhaïl
Journal
Japanese Journal of Applied Physics
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1896
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1896
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations