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Dielectric reliability of 70 nm pitch air-gap interconnect structures

dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorSebaai, Farid
dc.contributor.authorKellens, Kristof
dc.contributor.authorGoossens, Danny
dc.contributor.authorVereecke, Bart
dc.contributor.authorVersluijs, Janko
dc.contributor.authorVan Besien, Els
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorMarrant, Koen
dc.contributor.authorBender, Hugo
dc.contributor.authorMoussa, Alain
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-19T17:04:46Z
dc.date.available2021-10-19T17:04:46Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19537
dc.sourceIIOimport
dc.titleDielectric reliability of 70 nm pitch air-gap interconnect structures
dc.typeJournal article
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorGoossens, Danny
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1618
dc.source.endpage1622
dc.source.journalMicroelectronic Engineering
dc.source.issue7
dc.source.volume88
imec.availabilityPublished - open access


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