Dielectric reliability of 70 nm pitch air-gap interconnect structures

Pantouvaki, Marianna; Sebaai, Farid; Kellens, Kristof; Goossens, Danny; Vereecke, Bart; Versluijs, Janko; Van Besien, Els; Caluwaerts, Rudy; Marrant, Koen; Bender, Hugo; Moussa, Alain; Struyf, Herbert; Beyer, Gerald

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Dielectric reliability of 70 nm pitch air-gap interconnect structures

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2011

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Microelectronic Engineering

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Dielectric reliability of 70 nm pitch air-gap interconnect structures

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