Dielectric reliability of 70 nm pitch air-gap interconnect structures

Pantouvaki, Marianna; Sebaai, Farid; Kellens, Kristof; Goossens, Danny; Vereecke, Bart; Versluijs, Janko; Van Besien, Els; Caluwaerts, Rudy; Marrant, Koen; Bender, Hugo; Moussa, Alain; Struyf, Herbert; Beyer, Gerald

Publication:

Dielectric reliability of 70 nm pitch air-gap interconnect structures

Date

2011

Journal article

Simple item page Full metadata Statistics

Files

22759.pdf 928.92 KB

Author(s)

;

;

;

;

;

;

;

;

;

;

;

;

Journal

Microelectronic Engineering

Statistics

1974 since deposited on 2021-10-19

1last month

Acq. date: 2026-01-25

Dielectric reliability of 70 nm pitch air-gap interconnect structures

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations