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Ultra low-k materials based on self-assembled organic polymers

dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorZhao, Larry
dc.contributor.authorHuffman, Craig
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorOno, Yukiharu
dc.contributor.authorNakajima, Michio
dc.contributor.authorNakatani, Koji
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-19T17:05:14Z
dc.date.available2021-10-19T17:05:14Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19538
dc.sourceIIOimport
dc.titleUltra low-k materials based on self-assembled organic polymers
dc.typeProceedings paper
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1335-o01-02
dc.source.conferenceMaterials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics
dc.source.conferencedate26/04/2011
dc.source.conferencelocationSan Franscisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 1335


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