dc.contributor.author | Pantouvaki, Marianna | |
dc.contributor.author | Zhao, Larry | |
dc.contributor.author | Huffman, Craig | |
dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Ono, Yukiharu | |
dc.contributor.author | Nakajima, Michio | |
dc.contributor.author | Nakatani, Koji | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-19T17:05:14Z | |
dc.date.available | 2021-10-19T17:05:14Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19538 | |
dc.source | IIOimport | |
dc.title | Ultra low-k materials based on self-assembled organic polymers | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Pantouvaki, Marianna | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1335-o01-02 | |
dc.source.conference | Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics | |
dc.source.conferencedate | 26/04/2011 | |
dc.source.conferencelocation | San Franscisco, CA USA | |
imec.availability | Published - open access | |
imec.internalnotes | MRS Symposium Proceedings; Vol. 1335 | |