dc.contributor.author | Paraschiv, Vasile | |
dc.contributor.author | Vecchio, Emma | |
dc.contributor.author | Milenin, Alexey | |
dc.contributor.author | Kar, Gouri Sankar | |
dc.contributor.author | Demand, Marc | |
dc.contributor.author | Coenegrachts, Bart | |
dc.contributor.author | Vertommen, Johan | |
dc.contributor.author | Boullart, Werner | |
dc.date.accessioned | 2021-10-19T17:05:40Z | |
dc.date.available | 2021-10-19T17:05:40Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19539 | |
dc.source | IIOimport | |
dc.title | Memory node and oxide-nitride-oxide gate stack patterning for a bi-layer poly-silicon channel | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Paraschiv, Vasile | |
dc.contributor.imecauthor | Vecchio, Emma | |
dc.contributor.imecauthor | Milenin, Alexey | |
dc.contributor.imecauthor | Kar, Gouri Sankar | |
dc.contributor.imecauthor | Demand, Marc | |
dc.contributor.imecauthor | Coenegrachts, Bart | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.orcidimec | Milenin, Alexey::0000-0003-0747-0462 | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.source.peerreview | no | |
dc.source.conference | 33rd International Symposium on Dry Process - DPS | |
dc.source.conferencedate | 10/11/2011 | |
dc.source.conferencelocation | Kyoto Japan | |
imec.availability | Published - imec | |