Show simple item record

Micro-characterisation of Pt silicides prepared on (100) silicon

dc.contributor.authorJin, S.
dc.contributor.authorBender, Hugo
dc.contributor.authorAlves Donaton, Ricardo
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-09-30T08:30:28Z
dc.date.available2021-09-30T08:30:28Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1953
dc.sourceIIOimport
dc.titleMicro-characterisation of Pt silicides prepared on (100) silicon
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage497
dc.source.endpage500
dc.source.conferenceMicroscopy of Semiconducting Materials 1997
dc.source.conferencedate7/04/1997
dc.source.conferencelocationOxford UK
imec.availabilityPublished - open access
imec.internalnotesIOP Conference Series; Vol. 157


Files in this item

Thumbnail
Name:
1923.pdf
Size:
413.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record