Microstructural studies of Co silicide layers formed on SiGe and SiGeC

Thumbnail
View/open
Metadata
Show full item record
Authors
Jin, S.; Bender, Hugo; Donaton, R. A.; Maex, Karen; Vantomme, Andre; Langouche, G.; St. Amour, A.; Sturm, J. C.
Conference
Structure and Evolution of Surfaces
Title
Microstructural studies of Co silicide layers formed on SiGe and SiGeC
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections