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Design, fabrication and characterization of electrostatic micro actuators for microfluidic platforms

dc.contributor.authorPatrascu, Mihai
dc.contributor.authorGonzalo Ruiz, Javier
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorCrego Calama, Mercedes
dc.contributor.authorBrongersma, Sywert
dc.date.accessioned2021-10-19T17:09:11Z
dc.date.available2021-10-19T17:09:11Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19548
dc.sourceIIOimport
dc.titleDesign, fabrication and characterization of electrostatic micro actuators for microfluidic platforms
dc.typeProceedings paper
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1181
dc.source.endpage1184
dc.source.conferenceEurosensors XXV
dc.source.conferencedate4/09/2011
dc.source.conferencelocationAthens Greece
imec.availabilityPublished - open access
imec.internalnotesProcedia Engineering; Vol. 25


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