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Post-bonding fabrication of photonic devices in an indium phosphide membrane bonded on glass
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Authors
Pello, J.
;
Saboya, P.
;
Keyvaninia, Shahram
;
van der Tol, J.J.G.M.
;
Roelkens, Gunther
;
Ambrosius, H.P.M.M.
;
Smit, M.K.
Conference
Proceedings of the Annual Symposium of the IEEE Photonics Benelux Chapter
Title
Post-bonding fabrication of photonic devices in an indium phosphide membrane bonded on glass
Publication type
Proceedings paper
Embargo date
9999-12-31
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