Authors

Jones, S. K.; Bazley, D. J.; Beanland, R.; Badenes, Gonçal; Scaife, B.

Conference

1997 International Conference on Simulation of Semiconductor Processes and Devices - SISPAD

Title

Simulation of advanced-LOCOS capability for sub-0.25 micron CMOS isolation

Publication type

Proceedings paper

Embargo date

9999-12-31