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Ultra Clean Processing Technologies: Advanced Si-Surface Preparation Techniques
Publication:
Ultra Clean Processing Technologies: Advanced Si-Surface Preparation Techniques
Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heyns, Marc
;
Meuris, Marc
;
Mertens, Paul
;
Hurd, Trace
;
Schmidt, Harald
;
Verhaverbeke, Steven
;
Hatcher, Z.
;
Gräf, D.
Journal
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2082
since deposited on 2021-09-29
423
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
2082
since deposited on 2021-09-29
423
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations