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Improved EOT and leakage current for metal-insulator-metal capacitor stacks with rutile TiO2
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1912 since deposited on 2021-10-19
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Acq. date: 2026-10-09
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Statistics
Views
1912 since deposited on 2021-10-19
3last month
3last week
Acq. date: 2026-10-09
Citations