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Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorRadisic, Dunja
dc.contributor.authorKim, Min-Soo
dc.contributor.authorKaczer, Ben
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorDelabie, Annelies
dc.contributor.authorMoussa, Alain
dc.contributor.authorVrancken, Christa
dc.contributor.authorOpsomer, Karl
dc.contributor.authorFranquet, Alexis
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorSchaekers, Marc
dc.contributor.authorAltimime, Laith
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-19T17:31:19Z
dc.date.available2021-10-19T17:31:19Z
dc.date.issued2011
dc.identifier.issn1862-6254
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19601
dc.sourceIIOimport
dc.titleControlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium
dc.typeJournal article
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.identifier.doi10.1002/pssr.201004462
dc.source.peerreviewyes
dc.source.beginpage19
dc.source.endpage21
dc.source.journalPhysica Status Solidi. Rapid Research Letters
dc.source.issue1
dc.source.volume5
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201004462/full
imec.availabilityPublished - imec


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