Publication:

Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

Date

2011

Journal article

https://doi.org/10.1002/pssr.201004462

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Author(s)

Popovici, Mihaela Ioana

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;

Tomida, Kazuyuki

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;

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Richard, Olivier

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Delabie, Annelies

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;

Vrancken, Christa

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;

Franquet, Alexis

;

Pawlak, Malgorzata

;

Schaekers, Marc

;

Altimime, Laith

;

Van Elshocht, Sven

;

Journal

Physica Status Solidi. Rapid Research Letters

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