Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

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Authors

Popovici, Mihaela Ioana; Swerts, Johan; Tomida, Kazuyuki; Radisic, Dunja; Kim, Min-Soo; Kaczer, Ben; Richard, Olivier; Bender, Hugo; Delabie, Annelies; Moussa, Alain; Vrancken, Christa; Opsomer, Karl; Franquet, Alexis; Pawlak, Malgorzata; Schaekers, Marc; Altimime, Laith; Van Elshocht, Sven; Kittl, Jorge

DOI

10.1002/pssr.201004462

ISSN

1862-6254

Issue

1

Journal

Physica Status Solidi. Rapid Research Letters

Volume

5

Title

Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

Publication type

Journal article

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