Publication:

Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

Date

2011
Journal article
https://doi.org/10.1002/pssr.201004462
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dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorRadisic, Dunja
dc.contributor.authorKim, Min-Soo
dc.contributor.authorKaczer, Ben
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorDelabie, Annelies
dc.contributor.authorMoussa, Alain
dc.contributor.authorVrancken, Christa
dc.contributor.authorOpsomer, Karl
dc.contributor.authorFranquet, Alexis
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorSchaekers, Marc
dc.contributor.authorAltimime, Laith
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorKittl, Jorge
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-19T17:31:19Z
dc.date.available2021-10-19T17:31:19Z
dc.date.issued2011
dc.identifier.doi10.1002/pssr.201004462
dc.identifier.issn1862-6254
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19601
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201004462/full
dc.source.beginpage19
dc.source.endpage21
dc.source.issue1
dc.source.journalPhysica Status Solidi. Rapid Research Letters
dc.source.volume5
dc.title

Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

dc.typeJournal article
dspace.entity.typePublication
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