Publication:

Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

Date

2011
Journal article
https://doi.org/10.1002/pssr.201004462
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Author(s)

Popovici, Mihaela Ioana  
;
Swerts, Johan  
;
Tomida, Kazuyuki  
;
Radisic, Dunja  
;
Kim, Min-Soo  
;
Kaczer, Ben  
;
Richard, Olivier  
;
Bender, Hugo  
;
Delabie, Annelies  
;
Moussa, Alain  
;
Vrancken, Christa  
;
Opsomer, Karl  
;
Franquet, Alexis  
;
Pawlak, Malgorzata
;
Schaekers, Marc  
;
Altimime, Laith
;
Van Elshocht, Sven  
;
Kittl, Jorge

Journal

Physica Status Solidi. Rapid Research Letters

Abstract

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1976 since deposited on 2021-10-19
Acq. date: 2025-12-09

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1976 since deposited on 2021-10-19
Acq. date: 2025-12-09

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