Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

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Author(s)

Popovici, Mihaela Ioana

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Tomida, Kazuyuki

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Richard, Olivier

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Delabie, Annelies

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Vrancken, Christa

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Franquet, Alexis

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Pawlak, Malgorzata

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Schaekers, Marc

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Altimime, Laith

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Van Elshocht, Sven

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Journal

Physica Status Solidi. Rapid Research Letters

Metrics

1974 since deposited on 2021-10-19

Acq. date: 2025-10-24