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Effects of the electrode positions on the dynamical behaviour of electrostatically actuated MEMS resonators

dc.contributor.authorPustan, Marius
dc.contributor.authorPaquay, Stephane
dc.contributor.authorRochus, Veronique
dc.contributor.authorGolinval, Jean-Claude
dc.date.accessioned2021-10-19T17:43:58Z
dc.date.available2021-10-19T17:43:58Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19633
dc.sourceIIOimport
dc.titleEffects of the electrode positions on the dynamical behaviour of electrostatically actuated MEMS resonators
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference12th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE
dc.source.conferencedate17/04/2011
dc.source.conferencelocationLinz Austria
imec.availabilityPublished - open access


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