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Influence of multiphysics couplings on the performance of a MEMS magnetometer

dc.contributor.authorRanvier, Sylvain
dc.contributor.authorPaquay, Stephane
dc.contributor.authorLamy, Hervé
dc.contributor.authorRochus, Veronique
dc.contributor.authorFrancis, Laurent
dc.contributor.authorRochus, Pierre
dc.date.accessioned2021-10-19T17:59:45Z
dc.date.available2021-10-19T17:59:45Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19669
dc.sourceIIOimport
dc.titleInfluence of multiphysics couplings on the performance of a MEMS magnetometer
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference12th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE
dc.source.conferencedate17/04/2011
dc.source.conferencelocationLinz Austria
imec.availabilityPublished - open access


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