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Design of a miniaturized accelerometer with 200 nm capacitive sensing gap

dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorSeveri, Simone
dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorFrancis, Laurent
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-19T18:00:12Z
dc.date.available2021-10-19T18:00:12Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19670
dc.sourceIIOimport
dc.titleDesign of a miniaturized accelerometer with 200 nm capacitive sensing gap
dc.typeMeeting abstract
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorSeveri, Simone
dc.source.peerreviewno
dc.source.conferenceICT.OPEN
dc.source.conferencedate14/11/2011
dc.source.conferencelocationVeldhoven Nederland
imec.availabilityPublished - imec


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