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Recent improvements in the fabrication and performances of AlN based piezoelectric vibration energy harvesters

dc.contributor.authorRenaud, Michael
dc.contributor.authorElfrink, Rene
dc.contributor.authorJambunathan, Madhu
dc.contributor.authorde Nooijer, Christine
dc.contributor.authorRovers, Madelon
dc.contributor.authorVullers, Ruud
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-19T18:05:02Z
dc.date.available2021-10-19T18:05:02Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19680
dc.sourceIIOimport
dc.titleRecent improvements in the fabrication and performances of AlN based piezoelectric vibration energy harvesters
dc.typeProceedings paper
dc.contributor.imecauthorElfrink, Rene
dc.contributor.imecauthorde Nooijer, Christine
dc.source.peerreviewno
dc.source.conferencePowerMEMS
dc.source.conferencedate15/11/2011
dc.source.conferencelocationSeoul Korea
imec.availabilityPublished - imec


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