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Characterization of nanodevices by STEM tomography

dc.contributor.authorRichard, Olivier
dc.contributor.authorVandooren, Anne
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-19T18:06:19Z
dc.date.available2021-10-19T18:06:19Z
dc.date.issued2011-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19683
dc.sourceIIOimport
dc.titleCharacterization of nanodevices by STEM tomography
dc.typeProceedings paper
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.source.peerreviewno
dc.source.beginpage100
dc.source.endpage104
dc.source.conferenceFrontiers of Characterization and Metrology for Nanoelectronics
dc.source.conferencedate23/05/2011
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec
imec.internalnotesAIP Conference Series; Vol. 1395


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