TiN/HfSiON for analog applications of nMuGFETs

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Authors
Rodrigues, M.; Galeti, M.; Martino, J.A.; Collaert, Nadine; Simoen, Eddy; Claeys, Cor
Conference
Advanced Semiconductor-on-Insulator Technology and Related Physics 15
Title
TiN/HfSiON for analog applications of nMuGFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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